On November 25th 2015. magnetron sputtering device model Pfeiffer Vacuum Classic 25 was successfully installed in our MEMSplit lab. The device was, also, successfully tested. Transportation to the lab and testing of the device are shown in the photo gallery bellow. J. Bickel from Pfeiffer, the company that manufactured the device, guided the process of installation and testing. During the testing aluminum was deposited on a glass surface. During this process plasma was visible in the chamber as shown in the video bellow.

 

Instaliran i upogonjen

Naš sputtering uređaj, instaliran i upogonjen! Gledate plazmu u komori tijekom naparivanja aluminija na staklo.

Posted by MEMSplit on 25. studenoga 2015